Microplasmas ignited and sustained by microwaves
نویسندگان
چکیده
منابع مشابه
Microplasmas for nanomaterials synthesis
Microplasmas have attracted a tremendous amount of interest from the plasma community because of their small physical size, stable operation at atmospheric pressure, non-thermal characteristics, high electron densities and non-Maxwellian electron energy distributions. These properties make microplasmas suitable for a wide range of materials applications, including the synthesis of nanomaterials...
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In this paper, a review on microplasma discharges is conducted. The different types and configurations used in microplasmas such as the Cathode Boundary Layer (CBL), Dielectric Barrier Discharge (DBD), Capillary Plasma Electrode Discharge (CPED), Inverted Square Pyramid (ISP), Square Cross Sectional Cavities (SCSC), Radio Frequency Inductively Coupled Discharge (RFIC), Radio Frequency Capacitiv...
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During the last decade a number of microcavity plasma devices have been developed. Examples are microhollow cathode (MHC) discharges and cathode boundary layer (CBL) discharges proposed by Schoenbach, capillary plasma electrode (CPE) discharges proposed by Kunhardt and Becker, and micro-structured electrode arrays (MSEs) introduced by Gericke and Penache. Arrays of microplasmas based on silicon...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2014
ISSN: 0963-0252,1361-6595
DOI: 10.1088/0963-0252/23/6/064002